Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818364 | Charged particle beam exposure apparatus and exposure method | — | 2004-11-16 |
| 6803589 | Apparatus and method applied to exposure by charged beam | — | 2004-10-12 |
| 6762421 | Charged particle beam exposure apparatus and exposure method | — | 2004-07-13 |
| 6737658 | Pattern observation apparatus and pattern observation method | Toru Koike | 2004-05-18 |
| 6703629 | Charged beam exposure apparatus having blanking aperture and basic figure aperture | — | 2004-03-09 |