Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6772045 | System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device | Masayuki Tanaka, Masaki Kamimura, Hiroshi Akahori, Ichiro Mizushima, Takashi Nakao +4 more | 2004-08-03 |
| 6713824 | Reliable semiconductor device and method of manufacturing the same | Yuuichi Mikata, Hiroshi Akahori | 2004-03-30 |