Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6679950 | Cleaning method and cleaner | Hiroshi Tomita, Soichi Nadahara, Mitsuhiko Shirakashi, Kenya Ito | 2004-01-20 |
| 6673163 | Apparatus and method for cleaning a semiconductor substrate | Hiroshi Tomita, Soichi Nadahara | 2004-01-06 |