Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815698 | Charged particle beam exposure system | Osamu Nagano, Yuichiro Yamazaki, Susumu Hashimoto | 2004-11-09 |
| 6768112 | Substrate inspection system and method for controlling same | Yuichiro Yamazaki | 2004-07-27 |