Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801295 | Post exposure modification of critical dimensions in mask fabrication | Hiroyuki Inomata, Osamu Katada, Masa-aki Kurihara, Takeshi Ohfuji, Shiho Sasaki | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801295 | Post exposure modification of critical dimensions in mask fabrication | Hiroyuki Inomata, Osamu Katada, Masa-aki Kurihara, Takeshi Ohfuji, Shiho Sasaki | 2004-10-05 |