Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741327 | Method of correcting projection optical system and method of manufacturing semiconductor device | Hiroshi Nomura, Manabu Takakuwa | 2004-05-25 |
| 6674511 | Evaluation mask, focus measuring method and aberration measuring method | Hiroshi Nomura | 2004-01-06 |