Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793124 | Diffusion-joined target assemly of high-purity cobalt target and copper alloy backing plate and production method therefor | Kazushige Takahashi | 2004-09-21 |
| 6759143 | Tantalum or tungsten target-copper alloy backing plate assembly and production method therefor | Kunihiro Oda, Takeo Okabe | 2004-07-06 |
| 6723183 | Silicide target for depositing less embrittling gate oxide and method of manufacturing silicide target | Kunihiro Oda | 2004-04-20 |