Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822738 | Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system | Craig M. Herzinger | 2004-11-23 |
| 6804004 | Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry | Craig M. Herzinger, Ping He, Martin M. Liphardt | 2004-10-12 |
| 6795184 | Odd bounce image rotation system in ellipsometer systems | Craig M. Herzinger, Steven E. Green | 2004-09-21 |
| 6741353 | Spectroscopic ellipsometry analysis of object coatings during deposition | — | 2004-05-25 |