Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6698728 | Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites | Megan Ravetz, Graham Williams, Andrew W. Nelson, Howard Williams, Rajesh Odedra | 2004-03-02 |