Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830871 | Chemical amplification type resist composition | Shinichi Kanna, Kazuyoshi Mizutani | 2004-12-14 |
| 6811947 | Positive resist composition | Kazuyoshi Mizutani, Shinichi Kanna | 2004-11-02 |
| 6727040 | Positive resist composition to be irradiated with one of an electron beam and X-ray | Kazuyoshi Mizutani, Koji Shirakawa | 2004-04-27 |