Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713380 | Methods for dry etching at low substrate temperatures using gas chemistry including a fluorocarbon gas and a gas including oxygen | — | 2004-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713380 | Methods for dry etching at low substrate temperatures using gas chemistry including a fluorocarbon gas and a gas including oxygen | — | 2004-03-30 |