Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806201 | Plasma processing apparatus and method using active matching | Naoki Yasui, Seiichi Watanabe, Hitoshi Tamura | 2004-10-19 |
| 6777037 | Plasma processing method and apparatus | Hitoshi Tamura, Seiichi Watanabe | 2004-08-17 |