Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797640 | Method of utilizing hard mask for copper plasma etch | Peter Nunan | 2004-09-28 |
| 6752900 | Vacuum loadlock ultraviolet bake for plasma etch | — | 2004-06-22 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797640 | Method of utilizing hard mask for copper plasma etch | Peter Nunan | 2004-09-28 |
| 6752900 | Vacuum loadlock ultraviolet bake for plasma etch | — | 2004-06-22 |