Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825988 | Etched silicon diffraction gratings for use as EUV spectral purity filters | — | 2004-11-30 |
| 6809327 | EUV source box | — | 2004-10-26 |
| 6809328 | Protective coatings for radiation source components | Manish Chandhok, Kramadhati V. Ravi, Melissa Shell | 2004-10-26 |