Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716771 | Method for post-CMP conversion of a hydrophobic surface of a low-k dielectric layer to a hydrophilic surface | Mark Buehler | 2004-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716771 | Method for post-CMP conversion of a hydrophobic surface of a low-k dielectric layer to a hydrophilic surface | Mark Buehler | 2004-04-06 |