Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793717 | Apparatus for keeping contamination away from a mask during exposure with light | Giang T. Dao | 2004-09-21 |
| 6737358 | Plasma etching uniformity control | Y. Long He, Albert Kwok, Tsukasa Abe | 2004-05-18 |
| 6710845 | Purging gas from a photolithography enclosure between a mask protective device and a patterned mask | Ronald J. Kuse | 2004-03-23 |