Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743683 | Polysilicon opening polish | Mark L. Doczy | 2004-06-01 |
| 6705928 | Through-pad slurry delivery for chemical-mechanical polish | — | 2004-03-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743683 | Polysilicon opening polish | Mark L. Doczy | 2004-06-01 |
| 6705928 | Through-pad slurry delivery for chemical-mechanical polish | — | 2004-03-16 |