Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797456 | Dual-layer deep ultraviolet photoresist process and structure | Yiming Gu, Anging Zhang | 2004-09-28 |
| 6733936 | Method for generating a swing curve and photoresist feature formed using swing curve | Yiming Gu | 2004-05-11 |