Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730463 | Method for determining and removing phase conflicts on alternating phase masks | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Christoph Nolscher | 2004-05-04 |
| 6680151 | Alternating phase mask | Michael Heissmeier, Markus Hofsäss, Burkhard Ludwig, Christoph Nolscher | 2004-01-20 |