Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835663 | Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity | — | 2004-12-28 |
| 6815364 | Tungsten hard mask | George Stojakovic | 2004-11-09 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835663 | Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity | — | 2004-12-28 |
| 6815364 | Tungsten hard mask | George Stojakovic | 2004-11-09 |