Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759323 | Method for filling depressions in a surface of a semiconductor structure, and a semiconductor structure filled in this way | — | 2004-07-06 |
| 6713364 | Method for forming an insulator having a low dielectric constant on a semiconductor substrate | — | 2004-03-30 |
| 6677218 | Method for filling trenches in integrated semiconductor circuits | Martin Schrems | 2004-01-13 |
| 6673693 | Method for forming a trench in a semiconductor substrate | — | 2004-01-06 |