Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825116 | Method for removing structures | Gerhard Beitel, Mattias Ahlstedt, Walter Hartner, Marcus Kastner, Volker Weinrich | 2004-11-30 |
| 6730562 | Method of patterning ferroelectric layers | Manfred Engelhardt, Walter Hartner, Frank Hintermaier, Volker Weinrich | 2004-05-04 |
| 6681148 | Monitoring system for a conveying device for flat articles, especially wafers | Hans Lettner, Xaver Kollmer, Ernst Georg Frisch | 2004-01-20 |