Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835508 | Large-area membrane mask and method for fabricating the mask | Jörg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Florian Letzkus, Hans Loschner +1 more | 2004-12-28 |
| 6773854 | Method of producing a perforated mask for particle radiation | Albrecht Ehrmann, Ernst Haugeneder, Alexander Petraschenko, Stefan Schunck | 2004-08-10 |