Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801314 | Alignment system and method using bright spot and box structure | Bernhard R. Liegl, Peter Thwaite | 2004-10-05 |
| 6784070 | Intra-cell mask alignment for improved overlay | Bernhard R. Liegl | 2004-08-31 |
| 6767674 | Method for obtaining elliptical and rounded shapes using beam shaping | — | 2004-07-27 |