Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734095 | Method for producing cavities with submicrometer patterns in a semiconductor device using a freezing process liquid | Rainer Leuschner | 2004-05-11 |
| 6696315 | Semiconductor device configuration with cavities of submicrometer dimensions and method of fabricating structured cavities | Rainer Leuschner | 2004-02-24 |