Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Herbert Vonach, Alfred Chalupka +3 more | 2004-07-27 |