Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825097 | Triple oxide fill for trench isolation | Patricia A. O'Neil, Deborah Ryan, Peter Smeys, Effendi Leobandung | 2004-11-30 |
| 6764922 | Method of formation of an oxynitride shallow trench isolation | Fen F. Jamin, Patrick R. Varekamp | 2004-07-20 |
| 6709951 | Oxynitride shallow trench isolation and method of formation | Fen F. Jamin, Patrick R. Varekamp | 2004-03-23 |