Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801396 | Substrate independent superpolishing process and slurry | Brent R. Den Hartog, James A. Hagan, John C. S. Shen, Kannimangalam Venkatasubramanyam Viswanathan | 2004-10-05 |