Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811959 | Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks | — | 2004-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811959 | Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasks | — | 2004-11-02 |