Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6789033 | Apparatus and method for characterizing features at small dimensions | Eric P. Solecky | 2004-09-07 |
| 6683305 | Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beam | Wei Lu, Chester Wasik | 2004-01-27 |