Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835916 | Ceramic heater | Yasuji Hiramatsu | 2004-12-28 |
| 6825555 | Hot plate | Yasuji Hiramatsu | 2004-11-30 |
| 6815646 | Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober | Yasuji Hiramatsu | 2004-11-09 |
| 6809299 | Hot plate for semiconductor manufacture and testing | Yasuji Hiramatsu | 2004-10-26 |
| 6753601 | Ceramic substrate for semiconductor fabricating device | Yasuji Hiramatsu | 2004-06-22 |
| 6731496 | Electrostatic chuck | Yasuji Hiramatsu | 2004-05-04 |
| 6717116 | Semiconductor production device ceramic plate | Yasuji Hiramatsu | 2004-04-06 |
| 6710307 | Ceramic heater | Yasuji Hiramatsu | 2004-03-23 |
| 6686570 | Hot plate unit | Masakazu Furukawa, Jo SAITO | 2004-02-03 |
| 6677557 | Ceramic heater | Yasuji Hiramatsu | 2004-01-13 |