Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730614 | Method of forming a thin film in a semiconductor device | Sun Jin YUN, Jin Ho Lee | 2004-05-04 |
| 6723642 | Method for forming nitrogen-containing oxide thin film using plasma enhanced atomic layer deposition | Sun Jin YUN | 2004-04-20 |