Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835587 | Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same | David T. Chang | 2004-12-28 |
| 6730978 | Single crystal, dual wafer, tunneling sensor and a method of making same | Michael J. Little, LeRoy H. Hackett | 2004-05-04 |
| 6698287 | Microgyro tuning using focused ion beams | Richard J. Joyce, Robert M'Closkey, A. Dorian Challoner | 2004-03-02 |
| 6674141 | Single crystal, tunneling and capacitive, three-axes sensor using eutectic bonding and a method of making same | David T. Chang | 2004-01-06 |