Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773508 | Single crystal silicon carbide thin film fabrication method and fabrication apparatus of the same | Katsutoshi Izumi, Motoi Nakao, Yoshiaki Ohbayashi, Keiji Mine | 2004-08-10 |
| 6743729 | Etching method and etching apparatus of carbon thin film | Katsutoshi Izumi, Keiji Mine, Yoshiaki Ohbayashi | 2004-06-01 |