Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727146 | Semiconductor device and method of manufacturing thereof | Eiichi Murakami, Akio Nishida, Kousuke Okuyama, Toshiaki Yamanaka, Jiro Yugami +1 more | 2004-04-27 |
| 6694634 | Position error evaluation method of moving device and method of improving movement accuracy based on evaluation results thereof | Hisayoshi Sato | 2004-02-24 |