HA

Hideaki Amano

TL Tokyo Electron Limited: 2 patents #53 of 414Top 15%
Overall (2004): #62,628 of 270,089Top 25%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6767429 Vacuum processing apparatus 2004-07-27
6730369 Device and method for plasma processing 2004-05-04