Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746908 | Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device | Kazuo Tanaka, Masaaki Ueno, Minoru Nakano | 2004-06-08 |
| 6711531 | Temperature control simulation method and apparatus | Kazuo Tanaka, Kenzo Urabe | 2004-03-23 |