Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821377 | Plasma processing apparatus | Susumu Saito | 2004-11-23 |
| 6733620 | Process apparatus | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa | 2004-05-11 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821377 | Plasma processing apparatus | Susumu Saito | 2004-11-23 |
| 6733620 | Process apparatus | Nobuyuki Okayama, Hidehito Saegusa, Jun Ozawa | 2004-05-11 |