Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831284 | Large area source for uniform electron beam generation | Alexandros T. Demos, Hari Ponnekanti, Jun Zhao, Helen R. Armer, Scott C. Woods | 2004-12-14 |
| 6753129 | Method and apparatus for modification of chemically amplified photoresist by electron beam exposure | Matthew Ross, Richard L. Ross | 2004-06-22 |