Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834549 | Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array | Goutam Paul | 2004-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834549 | Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array | Goutam Paul | 2004-12-28 |