Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808869 | Bottom anti-reflective coating material composition and method for forming resist pattern using the same | Kazuyoshi Mizutani | 2004-10-26 |
MM
Makoto Momota
Overall (2004): #160,877 of 270,089Top 60%
1
Patents 2004