Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829052 | Sensor detecting attenuated total reflection angle by using semiconductor laser unit driven with driving current on which high frequency component is superimposed | — | 2004-12-07 |
| 6741352 | Sensor utilizing attenuated total reflection | — | 2004-05-25 |
| 6707538 | Near-field exposure system selectively applying linearly polarized exposure light to exposure mask | — | 2004-03-16 |