Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827789 | Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry | Jian Zhang, Darren M. Simonelli, Keith D. Mullius, David A. Wassen | 2004-12-07 |
| 6718076 | Acousto-optic tunable filter with segmented acousto-optic interaction region | Kenneth Bures, Dogan Gunes, Paul Maki, Piero Sferlazzo | 2004-04-06 |