Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835667 | Method for etching high-k films in solutions comprising dilute fluoride species | Thomas J. Wagener, Neil Bruce Rosengren, Brent Schwab | 2004-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835667 | Method for etching high-k films in solutions comprising dilute fluoride species | Thomas J. Wagener, Neil Bruce Rosengren, Brent Schwab | 2004-12-28 |