Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809036 | Dry silylation plasma etch process | — | 2004-10-26 |
| 6794101 | Micro-electro-mechanical device and method of making | Jenn Hwa Huang, Lei Mercado, Shun-Meen Kuo | 2004-09-21 |
| 6776170 | Method and apparatus for plasma cleaning of workpieces | — | 2004-08-17 |
| 6706548 | Method of making a micromechanical device | — | 2004-03-16 |