Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743668 | Process for forming a metal oxy-nitride dielectric layer by varying the flow rate of nitrogen into the chamber | Mark V. Raymond, Bich-Yen Nguyen | 2004-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743668 | Process for forming a metal oxy-nitride dielectric layer by varying the flow rate of nitrogen into the chamber | Mark V. Raymond, Bich-Yen Nguyen | 2004-06-01 |