Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827833 | Electrodeposition of metals in high-aspect ratio cavities using modulated reverse electric fields | Jenny J. Sun | 2004-12-07 |
| 6750144 | Method for electrochemical metallization and planarization of semiconductor substrates having features of different sizes | — | 2004-06-15 |