Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798494 | Apparatus for generating partially coherent radiation | — | 2004-09-28 |
| 6768567 | Synchrotron-based EUV lithography illuminator simulator | — | 2004-07-27 |
| 6738135 | System for inspecting EUV lithography masks | James H. Underwood, Rupert C. C. Perera | 2004-05-18 |
| 6707560 | Dual-domain lateral shearing interferometer | Kenneth Alan Goldberg | 2004-03-16 |