Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6692622 | Plasma processing apparatus with an electrically conductive wall | Pascal Colpo | 2004-02-17 |
| 6682630 | Uniform gas distribution in large area plasma source | Pascal Colpo | 2004-01-27 |