Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703080 | Method and apparatus for VHF plasma processing with load mismatch reliability and stability | John E. Sortor | 2004-03-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6703080 | Method and apparatus for VHF plasma processing with load mismatch reliability and stability | John E. Sortor | 2004-03-09 |